First thing that comes to mind isn't a movie, but a television episode that scared me when I was a kid. It was season 4 of the 6 Million Dollar Man, and the two part episode was called
Death Probe 1 and
Death Probe 2. They aired in consecutive weeks begining January 9th, 1977 and finishing January 16th, 1977.
Here is a short episode recap:
'Death Probe' (Part 1)by Stephen E. De Souza
The Russian space program launches a new self-reliant probe to investigate the surface of the planet Venus. However, due to a malfunction, the probe crash-lands in Wyoming, in the United States of America; still believing that it has arrived on Venus, the probe immediately begins a trail of destruction – and a small town lies directly in its path. As the Russian and American forces each mount a desperate attempt to stop the probe before it wipes out the town’s population, Steve is called in to help. But can even his bionics defeat the virtually unstoppable machine?
'Death Probe' (Part 2)by Stephen E. De Souza
Steve faces his most dangerous threat yet: the rogue Venus probe is destroying everything in its path, and is rapidly approaching a small town. The armed forces have been unable to destroy the machine with conventional weapons, so it is up to Steve to stop it. But when even his bionically-assisted assault proves ineffectual, Steve realises that if brawn cannot defeat it the probe, then he must use his wits instead…
